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2013
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N. V. Toan, H. Miyashita, M. Toda, Y. Kawai and T. Ono, gFabrication of an hermetically packaged silicon resonator on LTCC substrateh, Microsystem Technologies, 19 (8), pp. 1165-1175 (2013).
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M. Toda, T. Otake, H. Miyashita, Y. Kawai, T. Ono, gSuspended bimaterial microchannel resonators for thermal sensing of local heat generation in liquidh, Microsystem Technologies, 19 (7), pp. 1049-4054 (2013).
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A. Wada, Y. Yanagisawa, B. Altansukh, T. Kubota, T. Ono, S. Yamasaki and S. Samukawa, gEnergy-loss mechanism of single-crystal silicon microcantilever due to surface defects generated during plasma processingh, J. Micromech. Microeng., 23 (6), 065020 (2013).
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Y. Tanaka, M. Miyashita, M. Esashi, T. Ono, gAn optically switchable emitter array with carbon nanotubes grown on a Si tip for multielectron beam lithographyh, Nanotechnology, 24(1), 015203 (2013).
iContactjTohoku University Division of Mechanical Engineering Ono Laboratory 6-6-01 Aramaki-Aza-Aoba, Aoba-ku Sendai 980-8579, JAPAN
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