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主な論文業績

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M. F. M. Sabri, T. Ono, S. M. Said, Y. Kawai, and M. Esashi, "Fabrication and Characterization of microstacked PZT actuator for MEMS applications", Journal of Microelectromechanical Systems 24, (2015) 80-90.

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Y. Kawai, K. Kotani, C. Y. Shao, and T. Ono, "Micro-Assembly of Electrostatically driven Scanning Force Microscopy Probe using Clip Mechanism", IEEJ Transactions on Sensors and Micromachines 135, (2015) 98-102.

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Y. J. Seo, M. Toda and T. Ono, "Si nanowire probe with Nd-Fe-B magnet for attonewton-scale force detection", Journal of Micromechanics and Microengineering 25 (2015) 045015.

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M. Toda, A. Yokoyama, N. V. Toan, N. Inomata, T. Ono, “Fabrication of nano-gap structures based on plastic deformation of strained Si springs by stiction effects”, Microsystem Technologies, 21(3) (2015), 649-654.

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M. Sato, M. Toda, N. Inomata, H. Maruyama, Y. Okamatsu-Ogura, F. Arai, T. Ono, A. Ishijima, Y. Inoue, “Temperature Changes in Brown Adipocytes Detected with a Bimaterial Microcantilever”, Biophysical Journal, 106 (11) (2014), 2458?2464.

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N. V. Toan, S. Sangu, N. Inomata, T. Ono, “Glass capillaries based on a glass reflow into nano-trench for controlling light transmission”, Microsystem Technologies, online (2015).

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T. Ono, M. Toda, Y. J. Seo, N. Inomata, “Si-based micro-nanomechanics for ultimate sensing”, ECS Transactions, 66, (2015) 123-129.

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G. Xue, M. Toda, and T. Ono, “Chip-Level Microassembly of XYZ-Microstage with Large Displacements”, IEEJ Transactions on Sensors and Micromachines, 135 (6), (2015) 236-237.

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Z. An, L. He, M. Toda, G. Yamamoto, T. Hashida, and T. Ono, "Microstructuring of carbon nanotubes-nickel nanocomposite", Nanotechnology 26 (2015) 195601

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R. Y. Belbachir, Z. An, and T. Ono, “Impact of thermal contact resistances on micro-gap heat losses for microthermionic power generators”, Microsystem Technologies, 15, (2015) 1-10.

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Y. C. Lin, Y. C. Tsai, T. Ono, P. Liu, M. Esashi, T. Gessner, and M. Chen, "Metallic glass as a mechanical material for microscanners", Advanst Functional Materials, 25, (2015), 5677-5682.

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N. V. Toan, S. Sangu, T. Saitoh, N. Inomata, T. Ono, "High Aspect Ratio SiO2 Capillary Based On Silicon Etching and Thermal Oxidation Process for Optical Modulator", International Journal of Environmental, Chemical, Ecological, Geological and Geophysical Engineering, 9(5) (2015) 464-469

(連絡先)東北大学 大学院工学研究科 機械システムデザイン工学専攻 小野研究室 
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