トップページEnglish|サイトマップ

主な論文業績

< 2016>

·
T. Yamada, N. Inomata, and T. Ono, “Sensitive thermal microsensor with pn junction for heat measurement of a single cell”, Japanese Journal of Applied Physics, 55 (2016) 027001.

·
N. Inomata, L. Pan, M. Toda, and T. Ono, “Temperature-depended mechanical properties of microfabricated vanadium oxide mechanical resonators for thermal sensing”, Japanese Journal of Applied Physics, 55 (3), (2016) 037201.

·
N.Inomata, K,Saito, T. Ono, “Q factor enhancement of Si resonator by nonlinear damping”, Microsystem Technologies, online (2016).

·
N. V. Toan, S. Sangu, T. Saito, N. Inomata, T. Ono, “Fabrication of a SiO2 Optical Window for Controlling Light Transmission" Microsystem Technologies, 23 (4), 919-927 (2016).

·
N. V. Toan, S. Sangu, T. Ono, "High Aspect Ratio SiO2 Pillar Structures Capable of the Integration of an Image Sensor for Application of Optical Modulator", IEEJ Transactions on Sensors and Micromachines (E), (2016) 136(29), 41-42.

·
J. Li, Z. An, Z. Wang, M. Toda and T. Ono, "Pulse-Reverse Electrodeposition and Micromachining of Graphene?Nickel Composite: An Efficient Strategy toward High-Performance Microsystem Application", ACS Applied Materials & Interfaces (2016), 8(6), 3969-3976.

·
G. Xue, M. Toda, and T. Ono, “Comb-Drive XYZ-Microstage with Large Displacements Based on Chip-Level Microassembly”, Journal of Micro electro mechanical systems, 25(6), 989-998 (2016).

·
J. Li, M. Zhu, Z. Wang, and T. Ono, “Engineering micro-supercapacitors of graphene nanowalls/Ni heterostructure based on microfabrication technology”, Applied Physics Letters, 109, 153901(2016).

·
N.V. Toan, M. Toda, and T. Ono, “Glass reflow process for microsystem applications”, Journal of micromechanics and microengineering, 7(51), 1-12 ((2016))

·
N. Inomata, L. Pan, Z. Wang, M. Kimura, and T. Ono, “Vanadium oxide thermal microsensor integrated in a microfluidic chip for detecting cholesterol and glucose concentrations”, Microsystem Technologies (2016)

·
N.V. Toan, S. Sangu, and T. Ono, “Design and fabrication of large area freestanding compressive stress SiO2 optical window”, Journal of micromechanics and microengineering, 26, 075016(2016).

·
N.V. Toan, T. Shimazaki, and T. Ono, “Single and mechanically coupled capacitive silicon nanomechanical resonator”, Micro & Nano letters, 11, 591-594 (2016).

·
N.V. Toan, S. Sangu, and T. Ono, “Fabrication of deep SiO2 and Tempax glass pillar structures by reactive ion etching for optical modulator”, Journal of micromechanical systems, 25, 668-674 (2016)

·
N.V. Toan, S. Sangu, and T. Ono, “Glass reflow process for microsystem applications”, Journal of micromechanics and microengineering, 26, 115018 (2016).

·
N. Inomata, M. Toda and T. Ono, "Highly sensitive thermometer using a vacuumpacked Si resonator in a microfluidic chip for the thermal measurement of single cells", Lab on a Chip, 16, 3597?3603 (2016).

·
Y. Kawai, J.H. Kim, N. Inomata, and T. Ono, "Parametrically Actuated Resonant Micromirror Using Stiffness Tunable Torsional Springs", sensors and materials, 28(2), 131?139 (2016)

·
I. Voiculescu, F. Liu, T. Ono, M. Toda, "Investigation of bimaterial cantilever beam for heat sensing in liquid", Sensors and Actuators, A: Physical 242, 58-66, (2016).

·
Z. An, M. Toda, and T. Ono, "Comparative investigation into surface charged multi-walled carbon nanotubes reinforced Cu nanocomposites for interconnect applications", Composites Part B: Engineering, 95, 15, 137-143 (2016)

(連絡先)東北大学 大学院工学研究科 機械システムデザイン工学専攻 小野研究室 
〒980-8579 仙台市青葉区荒巻字青葉6-6-01 機械系2号館4階 (居室)406,410号室, (教授室) 413号室
Tel: 022-795-5806 (教授室)/022-795-5810 (居室)/ Fax: 022-795-5808